nanocalc膜厚測(cè)量

光纖光譜儀,積分球,均勻光源,太赫茲系統(tǒng)應(yīng)用專家
光譜儀
>>
光譜儀系統(tǒng)
>>
激光器
>>
激光測(cè)量
>>
寬帶光源
>>
LED和影像測(cè)量
>>
光譜儀附件
>>
太赫茲系統(tǒng)
>>
濾光片
 濾光片
石墨烯納米材料
 石墨烯納米材料
 

 

NanoCalc 反射膜厚測(cè)量系統(tǒng)

膜厚測(cè)量 薄膜的光學(xué)特性主要有反射和干涉。NanoCalc薄膜反射測(cè)量系統(tǒng)可以用來(lái)進(jìn)行10nm -250um的膜厚分析測(cè)量,對(duì)單層膜的分辨率為0.1nm。根據(jù)測(cè)量軟件的不同,在1秒鐘內(nèi)可以分析單層或多達(dá)到10層的膜厚。

 

產(chǎn)品特點(diǎn)

  • 可分析單層或多層薄膜;
  • 分辨率達(dá)0.1nm;
  • 適合于在線監(jiān)測(cè);

使用原理

常用的兩種測(cè)量薄膜的特性的方法為光學(xué)反射和投射測(cè)量、橢圓光度法測(cè)量。NanoCalc利用反射原理,通過(guò)測(cè)量寬光譜范圍內(nèi)的反射率曲線來(lái)進(jìn)行膜厚測(cè)量。

查找n和k值

可以進(jìn)行多達(dá)十層的薄膜測(cè)量,薄膜和基體材質(zhì)可以是金屬、電介質(zhì)、無(wú)定形材料或硅晶等。NanoCalc軟件包含了大多數(shù)材料的n和k值數(shù)據(jù)庫(kù),用戶也可以自己添加和編輯。

 

  膜厚測(cè)量

應(yīng)用

NanoCalc薄膜反射材料系統(tǒng)適合于在線膜厚測(cè)量,包括氧化層、中氮化硅薄膜、感光膠片及其它類型的薄膜。NanoCalc也可測(cè)量在鋼、鋁、銅、陶瓷、塑料等物質(zhì)上的抗反射涂層、抗磨涂層等。

NanoCalc Systems Available

NANOCALC-2000-UV-VIS-NIR

Wavelength:

250-1100 nm

Thickness:

10 nm-70 um

Light source:

Deuterium and Tungsten Halogen

NANOCALC-2000-UV-VIS

Wavelength:

250-850 nm

Thickness:

10 nm-20 um

Light source:

Deuterium and Tungsten Halogen

NANOCALC-2000-VIS-NIR

Wavelength:

400-1100 nm

Thickness:

20 nm-10 um (optional 1 um-250 um)

Light source:

Tungsten Halogen

NANOCALC-2000-VIS

Wavelength:

400-850 nm

Thickness:

50 nm-20 um

Light source:

Tungsten Halogen

NANOCALC-2000-NIR

Wavelength:

650-1100 nm

Thickness:

70 nm-70 um

Light source:

Tungsten Halogen

NANOCALC-2000-NIR-HR

Wavelength:

650-1100 nm

Thickness:

70 nm-70 um

Light source:

Tungsten Halogen

NANOCALC-2000-512-NIR

Wavelength:

900-1700 nm

Thickness:

50 nm-200 um

Light source:

High-power Tungsten Halogen

For Reflectometry applications, the following items are required:

NC-2UV-VIS100-2

Bifurcated UV fiber
400 um x 2m
2x SMA connectors
Flexible metal jacketing

NC-STATE

Single point reflection measurement for non transparent samples

Step-Wafer 5 Steps 0-500 mm, calibrated 4"

If using a microscope, the following items are also needed:

NC-7UV-VIS200-2

Reflection probe for application microscopy with MFA-C-Mount

Step-Wafer 5 Steps 0-500 mm, calibrated 4"

NanoCalc Specifications

Angle of incidence:

90°

Number of layers:

3 or fewer

Reference measurement needed:

Yes (bare substrate)

Transparent materials:

Yes

Transmission mode:

Yes

Rough materials:

Yes

Measurement speed:

100 milliseconds to 1 second

On-line possibilities:

Yes

Mechanical tolerance (height):

With new reference or collimation (74-UV)

Mechanical tolerance (angle):

Yes, with new reference

Microspot option:

Yes, with microscope

Vision option:

Yes, with microscope

Mapping option:

6" and 12" XYZ mapping tables

Vacuum possibilities:

Yes

 

 


玻色智能科技有限公司光譜儀專家
上海玻色智能科技有限公司
上海: (021)3353-0926, 3353-0928   北京: (010)8217-0506
廣州: 139-0221-4841   武漢: 139-1733-4172
全國(guó)銷售服務(wù)熱線:4006-171751   Email: info@bosontech.com.cn
www.alharamainfoundation.com    2008-2022 All Rights Reserved!